Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Reactive Ion Etching of Sige Alloys using Fluorine-Containing Plasmas *
- - James W. Corbett
  - Gottlieb S. Oehrlein
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of ion bombardment in plasma etching on the fluorinated silicon surface layer: Real-time and postplasma surface studies
- - Gottlieb S. Oehrlein
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe measurements of a radio frequency induction plasma
- - J. Hopwood
  - C.R. Guarnieri
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Selective reactive ion etching of phosphorus-doped oxide over undoped SiO₂
- - David Vender
  - Gottlieb S. Oehrlein
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electromagnetic fields in a radio-frequency induction plasma
- - J. Hopwood
  - C.R. Guarnieri
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Influence of surface-activated reaction kinetics on low-pressure chemical vapor deposition conformality over micro features
- - Julian J. Hsieh
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reflection High-Energy Electron Diffraction Intensity Monitored Homoepitaxial Growth of Srtio₃ Buffer Layer by Pulsed Laser Deposition
- - M.Y. Chern
  - A. Gupta
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper deposition by electron cyclotron resonance plasma
- - A. Sugerrnan
  - F.E. Turene
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular Dynamics Modeling of Microstructure and Stresses in Sputter-Deposited Thin Films
- - F. Jones
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electron and Hole Spin Lifetimes in zn_1-xMn_xSe and Zn_1-yFe_yse Based Heterostructures
- - L.P. Fu
  - W.Y. Yu
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films