Publications

93 results at MRS Proceedings

Crystallographic texture and phase metrology during damascene copper processing
- - K.J. Kozaczek
  - P. DeHaven
  - et al.
- 2002
- MRS Proceedings 2002
Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- - Spyridon Skordas
  - Filippos Papadatos
  - et al.
- 2002
- MRS Proceedings 2002
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- - A. Grill
  - V.V. Patel
  - et al.
- 2002
- MRS Proceedings 2002
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- - Q.R. Huang
  - David Mecerreyes
  - et al.
- 2002
- MRS Proceedings 2002
The effect of surface preparation on the structure and electrical transport in an organic semiconductor
- - Laura L. Kosbar
  - Christos D. Dimitrakopoulos
  - et al.
- 2001
- MRS Proceedings 2001
Strain relaxation mechanisms in He⁺-implanted and annealed Si_1-xGe_x layers on Si(001) substrates
- - S. Christiansen
  - P.M. Mooney
  - et al.
- 2001
- MRS Proceedings 2001
A self-aligned silicide process for thin silicon-on-insulator MOSFETs and bulk MOSFETs with shallow junctions
- - G.M. Cohen
  - C. Cabral Jr.
  - et al.
- 2001
- MRS Proceedings 2001
A patterned SOI by masked anneal for system-on-chip applications
- - G.M. Cohen
  - D.K. Sadana
- 2001
- MRS Proceedings 2001
Thermal stability of strained Si on relaxed Si_1-xGe_x buffer layers
- - P.M. Mooney
  - S.J. Koester
  - et al.
- 2001
- MRS Proceedings 2001
Energy level alignment and exciton binding energies using model interfaces between metals and evaporable organic electroluminescent materials
- - Santos F. Alvarado
  - Walter Rieß
- 2001
- MRS Proceedings 2001