Discharge of P2+ ions in the beamline of medium current implanters
- K. Brack
- W. Euen
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
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64 results at Nuclear Inst. and Methods in Physics Research, B
Uniformity characterization of an RTP system
- Jeffrey C. Gelpey
- Paul O. Stump
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Shallow implants into GaAs
- Volker Graf
- Willi Heuberger
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Theory and simulation of high-energy ion scattering experiments for structure analysis of surfaces and interfaces
- J.W.M. Frenken
- R.M. Tromp
- et al.
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Bombardment-induced Gibbsian segregation and its role in secondary ion formation
- Roger Kelly
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Model for direct ejection of diatomic molecules by collisional sputtering
- R.E. Walkup
- Ph. Avouris
- et al.
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Mechanisms of atomic ion emission during sputtering
- Ming L. Yu
- Norton D. Lang
- 1986
- Nuclear Inst. and Methods in Physics Research, B
A SIMS-XPS study on silicon and germanium under O+2 bombardment
- W. Reuter
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Chemical enhancement effects in SIMS analysis
- Ming L. Yu
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Electron stimulated desorption of excited OH radicals from SrF2 surfaces
- R. Beigang
- F. Bozso
- et al.
- 1986
- Nuclear Inst. and Methods in Physics Research, B