Hollow-cathode-enhanced magnetron sputtering
- J.J. Cuomo
- S.M. Rossnagel
- 1986
- JVSTA
Publications
176 results at JVSTA
Contact and metallization problems in GaAs integrated circuits
- N. Braslau
- 1986
- JVSTA
Interaction of metals with model polymer surfaces: Core level photoemission studies
- P.N. Sanda
- J.W. Bartha
- et al.
- 1986
- JVSTA
Properties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
Properties of Cr-N films produced by reactive sputtering
- K.K. Shih
- D.B. Dove
- et al.
- 1986
- JVSTA
Summary Abstract: Vibrations of ammonia on the Cu(100) surface
- Ingo Hussla
- Charles W. Bauschlicher
- 1986
- JVSTA
Control of thin film orientation by glancing angle on bombardment during growth
- Lock See Yu
- James M.E Harper
- et al.
- 1986
- JVSTA
Summary Abstract: Classical trajectory calculations of photon-stimulated desorption of ions from alkali-halides
- R.E. Walkup
- Ph. Avouris
- 1986
- JVSTA
Nanosecond pulsed laser-induced segregation of Te in TeOx films
- W.-Y. Lee
- H. Coufal
- et al.
- 1986
- JVSTA
Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA