Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- - N.J. Chou
  - J. Paraszczak
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of Au film on the kinetics of platinum silicide formation
- - Jerng-Sik Song
  - Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of clean polyimide films by high-resolution electron energy-loss spectroscopy
- - T.C. Clarke
  - C. Gregoire
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- - C.T. Rettner
  - J. Kimman
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: In situ surface and interface magnetic characterization of thin films
- - Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Charge transport in magnetrons
- - S.M. Rossnagel
  - H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radio frequency sputter deposition of si02 films at high rate
- - J.S. Logar
  - F. Jones
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: The low-temperature reactivity of Si(100) with NH3 and NO: Rate determining steps and rate enhancement via electronic excitations
- - F. Bozso
  - Ph. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Chernisorption of silanes on the Si(111)-(7x7) surface
- - S. Gates
  - B.A. Scott
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Transmission electron microscopy studies of the microstructure of AuNiGe ohmic contact to n-type GaAs
- - Yih-Cheng Shih
  - E.L. Wilkie
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films