Diffusion of boron, phosphorus, and arsenic implanted in thin films of cobalt disilicide
- O. Thomas
- P. Gas
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Control of microstructure and properties of copper films using ion-assisted deposition
- R.A. Roy
- J.J. Cuomo
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Atomic force microscopy studies of frictional forces and of force effects in scanning tunneling microscopy
- C. Mathew Mate
- Ragnar Erlandsson
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High-rate reactive sputter deposition of zirconium dioxide
- Fletcher Jones
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Molecular-beam studies of dissociative chemisorption of O2on Pt(111)
- M.D. Williams
- D.S. Bethune
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Analysis of Co-doped iron oxide thin films by grazing incidence x-ray diffraction
- Michael F. Toney
- Ting C. Huang
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The change in Si-AI bonding with metal coverage at the Si(111)^3 xV3-AI interface
- J.S. Nelson
- Inder P. Batra
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Properties of hard tungsten films prepared by sputtering
- K.K. Shih
- D.A. Smith
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Scanning tunneling microscopy imaging and registration of the (v 3 x v3) R30° Ag/Si(111) surface
- R.J. Wilson
- S. Chiang
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films