Vector diffraction analysis of phase-mask imaging in photoresist films
- Donis G. Flagello
- Alan E. Rosenbluth
- 1993
- Microlithography 1993
Publications
3548 results for Mathematical Sciences
Process optimization of APEX-E
- Karen Petrillo
- 1993
- Microlithography 1993
Developments in 2D AFM metrology
- Diana Nyyssonen
- 1993
- Microlithography 1993
Post-exposure bake as a process-control parameter for chemically-amplffied photoresist
- John L. Sturtevant
- Steven J. Holmes
- et al.
- 1993
- Microlithography 1993
A tetrahedral interpolation technique for color space conversion
- James M. Kasson
- Wil Plouffe
- et al.
- 1993
- IS&T/SPIE Electronic Imaging 1993
Optimal estimation of linear operators from inaccurate data: A second look
- Charles A. Micchelli
- 1993
- Numerical Algorithms
Covering the complete graph with plane cycles
- Alan Hartman
- Yoav Medan
- 1993
- Discrete Applied Mathematics
Monge and feasibility sequences in general flow problems
- Ilan Adler
- Alan J. Hoffman
- et al.
- 1993
- Discrete Applied Mathematics
Irredundancy in circular arc graphs
- Martin Charles Golumbic
- Renu C. Laskar
- 1993
- Discrete Applied Mathematics
Computational materials science for microelectronics - the old and the new challenges
- Sokrates T. Pantelides
- 1993
- Physica D: Nonlinear Phenomena