A DUAL DAMASCENE HARD METAL CAPPED CU AND AL-ALLOY FOR INTERCONNECT WIRING OF ULSI CIRCUITS
- H. Dalai
- R.V. Joshi
- et al.
- 1993
- IEDM 1993
Publications
13 results at IEDM 1993
INVESTIGATION OF HOT ELECTRON LUMINESCENCE IN SILICON BY MEANS OF DUAL-GATE MOSFET's
- Luca Selmi
- Hon-Sum Wong
- et al.
- 1993
- IEDM 1993
High transconductance n- and p-channel GaAs MESFETs using novel amphipolar Cu3Ge ohmic contacts
- C.L. Lin
- M.O. Aboelfotoh
- et al.
- 1993
- IEDM 1993