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Karen Petrillo- Karen Petrillo
- David Medeiros
- et al.
- 2002
- SPIE Photomask Technology 2002
- Christina Deverich
- Andrew Watts
- et al.
- 2002
- Photomask and Next-Generation Lithography Mask Technology 2002
- Karen Petrillo
- John Simons
- et al.
- 2002
- Microlithography 2002
- David R. Medeiros
- Karen Petrillo
- et al.
- 2002
- Microlithography 2002
- Q. Lin
- K.E. Petrillo
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
- Qinghuang Lin
- Ahmad D. Katnani
- et al.
- 1998
- Microlithography 1998
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
- Ratnam Sooriyakumaran
- Gregory M. Wallraff
- et al.
- 1998
- Microlithography 1998
- Ari Aviram
- Marie Angelopoulos
- et al.
- 1998
- Microlithography 1998
- Karen Petrillo
- James Brancaccio
- et al.
- 1997
- Microlithography 1997