Breakthrough reduction of low-k damage with cryoplasma ashing
- Francesca Iacopi
- Jai Hyuk Choi
- et al.
- 2010
- ADMETA 2010
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Cryogenic plasmas for controlled processing of nanoporous materials
- Francesca Iacopi
- Jai Hyuk Choi
- et al.
- 2011
- Physical Chemistry Chemical Physics