Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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8 results for Alain C. Diebold

Silicon fin line edge roughness determination and sensitivity analysis by Mueller matrix spectroscopic ellipsometry based scatterometry
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Higher-K formation in atomic layer deposited Hf_1-xAl_xO_y
- - Kandabara Tapily
  - Steven Consiglio
  - et al.
- 2014
- ECSSMEQ 2014
Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf_0.5Zr_0.5O₂films
- - Vineetha Mukundan
  - Steven Consiglio
  - et al.
- 2020
- Applied Physics Letters
Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
- - Sonal Dey
  - Kai-Hung Yu
  - et al.
- 2017
- JVSTA
Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS
Optical properties of pseudomorphic Ge_1-xSn_x (x = 0 to 0.11) alloys on Ge(001)
- - Manasa Medikonda
  - Gangadhara R. Muthinti
  - et al.
- 2014
- JVSTB
Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO₂and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
- - Steven Consiglio
  - Kandabara Tapily
  - et al.
- 2014
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf _1-xZr_xO₂ gate dielectrics deposited by a cyclical deposition and annealing scheme
- - Relja Vasić
  - Steven Consiglio
  - et al.
- 2013
- Journal of Applied Physics