Real time in-situ stress evolution investigation of highly textured electrodeposited bismuth thin films
- Donglei Fan
- Frank Q. Zhu
- et al.
- 2003
- MRS Spring Meeting 2003
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17 results for Ingrid Shao
Novel approach to reduce source/drain series and contact resistance in high-performance UTSOI CMOS devices using selective electrodeless CoWP or CoB process
- James Pan
- Anna Topol
- et al.
- 2007
- IEEE Electron Device Letters
Optimization of Cu damascene electrodeposition process in ULSI for yield and reliability improvement
- Ingrid Shao
- T. Cheng
- et al.
- 2013
- ECS Transactions
Mechanism study of Ag catalyzed directional etch of silicon for nanowire formation
- Ingrid Shao
- Lynne Gignac
- 2011
- ECS Meeting 2011
Stress in electrodeposited high moment CoFe films
- I. Shao
- L. Romankiw
- et al.
- 2009
- ECS Meeting 2009
An alternative low resistance MOL technology with electroplated rhodium as contact plugs for 32nm CMOS and beyond
- I. Shao
- J.M. Cotte
- et al.
- 2007
- IITC 2007
Effect of oxygen incorporation on soft magnetic properties of iron-rich CoFe alloys
- J.W. Lam
- C. Bonhôte
- et al.
- 2004
- ECS Meeting 2004
Pulse plating effect on stress of CoFe electrodeposits
- I. Shao
- C. Bonhôte
- et al.
- 2004
- ECS Meeting 2004
Novel approach to reduce source/drain series resistance in high performance CMOS devices using self-aligned CoWP process for 45nm node UTSOI transistors with 20nm gate length
- James Pan
- Anna Topol
- et al.
- 2006
- VLSI Technology 2006
Comparison of FECO films plated from an ammonium-containing sulfate bath and a SBA-containing sulfate bath
- Ingrid Shao
- Lubomyr T. Romankiw
- et al.
- 2004
- ECS Meeting 2004