Implementation of robust nickel alloy salicide process for high-performance 65nm SOI CMOS manufacturing
- Jay Strane
- David Brown
- et al.
- 2007
- VLSI-TSA 2007
Publications
116 results for Conal Murray
Mechanics of microelectronics structures as revealed by X-ray diffraction
- Conal E. Murray
- H. Yan
- et al.
- 2007
- Powder Diffraction
Submicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures
- Conal E. Murray
- M. Sankarapandian
- et al.
- 2007
- Applied Physics Letters
Mapping local strain in thin film/substrate systems using x-ray microdiffraction topography
- Hanfei Yan
- Conal E. Murray
- et al.
- 2007
- Applied Physics Letters
Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope
- Oliver C. Wells
- L. Gignac
- et al.
- 2006
- Scanning
Mechanics of edge effects in anisotropic thin filmsubstrate systems
- 2006
- Journal of Applied Physics
High-mobility p-type transistor based on a spin-coated metal telluride semiconductor
- David B. Mitzi
- Matthew Copel
- et al.
- 2006
- Advanced Materials
The effect of Cu diffusion on the TDDB behavior in a low-k interlevel dielectrics
- J.R. Lloyd
- C.E. Murray
- et al.
- 2006
- Microelectronics Reliability
Thermal stress evolution in embedded Cu/low-k dielectric composite features
- Conal E. Murray
- Charles C. Goldsmith
- et al.
- 2006
- Applied Physics Letters
Underlayer effects on texture evolution in copper films
- C.E. Murray
- K.P. Rodbell
- et al.
- 2006
- Thin Solid Films