Three-dimensional atom-probe tomographic studies of nickel monosilicide/silicon interfaces on a subnanometer scale
- Praneet Adusumilli
- Conal E. Murray
- et al.
- 2009
- ECS Meeting 2009
Publications
116 results for Conal Murray
A rigorous comparison of X-ray diffraction thickness measurement techniques using silicon-on-insulator thin films
- Andrew J. Ying
- Conal E. Murray
- et al.
- 2009
- Journal of Applied Crystallography
Stress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2009
- MRS Spring Meeting 2009
Tomographic study of atomic-scale redistribution of platinum during the silicidation of Ni0.95 Pt0.05 /Si (100) thin films
- Praneet Adusumilli
- Lincoln J. Lauhon
- et al.
- 2009
- Applied Physics Letters
Strain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
- Conal E. Murray
- Z. Ren
- et al.
- 2009
- Applied Physics Letters
Stress gradients induced in Cu films by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2008
- Applied Physics Letters
Mechanical behavior of stressed films on anisotropic substrates
- Conal E. Murray
- K.L. Saenger
- 2008
- Journal of Applied Physics
Silicide challenges for 22nm technologies and beyond
- Paul R. Besser
- Christian Lavoie
- et al.
- 2008
- ECS Meeting 2008
Material and integration issues for rare-Earth Silicides as gate and diffusion contacts in advanced CMOS
- C. D'Emic
- K. Ohuchi
- et al.
- 2008
- ECS Meeting 2008
Local strain distributions in silicon-on-insulator/stressor-film composites
- Özgür Kalenci
- Conal E. Murray
- et al.
- 2008
- Journal of Applied Physics