Tantalum as a diffusion barrier between copper and silicon: Failure mechanism and effect of nitrogen additions
- Karen Holloway
- Peter M. Fryer
- et al.
- 1992
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
162 results for Cyril Cabral
Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
- H.-N. Lin
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters