Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- Eri Hirahara
- Margareta Paunescu
- et al.
- 2015
- SPIE Advanced Lithography 2015
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Directed self-assembly of topcoat-free, Integration-friendly high-χ block copolymers
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2014
- J. Photopolym. Sci. Tech.