Publications

86 results for Nelson Felix

Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry gratings
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Overlay characterization and matching of immersion photoclusters
- - Blandine Minghetti
  - Timothy Brunner
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Toward perfect on-wafer pattern placement: Stitched overlay exposure tool characterization
- - Christopher P. Ausschnitt
  - Timothy A. Brunner
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Predicting and reducing substrate induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS