Sequential lateral solidification of silicon thin films on low-k dielectrics for low temperature integration
- Fabio Carta
- Stephen M. Gates
- et al.
- 2014
- Applied Physics Letters
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Sequential Lateral Solidification of Silicon Thin Films on Cu BEOL-Integrated Wafers for Monolithic 3-D Integration
- Fabio Carta
- Stephen M. Gates
- et al.
- 2015
- IEEE T-ED