Impact of LER on Mismatch in Nanosheet Transistors for 5nm-CMOS
- Chandan Kumar Jha
- Charu Gupta
- et al.
- 2020
- EDTM 2020
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Comparison of LER induced mismatch in NWFET and NSFET for 5-nm CMOS
- Chandan Kumar Jha
- Pritam Yogi
- et al.
- 2020
- IEEE J-EDS