Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- EuiJin Ko
- YooRim Jang
- et al.
- 2025
- SPIE Advanced Lithography 2025
Publications
4 results for Philjae Kang
New Photoacid Generators Designed for Advanced EUV Patterning
- Kamal P. Pandey
- Emad Aqad
- et al.
- 2025
- SPIE Advanced Lithography 2025
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
- Jayoung Koo
- YunJi Kim
- et al.
- 2024
- SPIE Advanced Lithography 2024