Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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2 results for T.E. Karlin

The influence of silicon substrate crystallinity and doping on TiSi₂ thin film morphology
- - T.E. Karlin
  - S. Nygren
  - et al.
- 1993
- Applied Surface Science
Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi₂ MOS process
- - T.E. Karlin
  - S.-L. Zhang
  - et al.
- 1993
- Applied Surface Science