Development of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh-vacuum primary-ion deposition
- Y.W. Kim
- I. Petrov
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Directed sputter deposition of AlCu: Film microstructure and microchemistry
- S.M. Rossnagel
- J. Moser
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films