Publications

2 results for Nicolas B. Piller

Energy flow in light-coupling masks for lensless optical lithography
- - Olivier J. F. Martin
  - Nicolas B. Piller
  - et al.
- 1998
- Optics Express
Light-coupling masks: An alternative, lensless approach to high-resolution optical contact lithography
- - Heinz Schmid
  - Hans Biebuyck
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures