Charge trapping in ultrathin hafnium oxide
- W. Zhu
- T.P. Ma
- et al.
- 2002
- IEEE Electron Device Letters
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Thermally stable ultra-thin Zr silicate for CMOS applications
- Z. Luo
- T.P. Ma
- et al.
- 2001
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings