Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Publications
Date
Featured collections
Popular topics
115 results for Ute Drechsler
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
- et al.
- 1999
- Applied Physics Letters
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
Soft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
- et al.
- 1999
- Review of Scientific Instruments