Several issues regarding the nanopore structure in low-dielectric-constant films detected by positron annihilation lifetime spectroscopy
- C.L. Wang
- M.H. Weber
- et al.
- 2003
- Radiation Physics and Chemistry
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6 results for M.H. Weber
Positron annihilation techniques suited for porosity characterization of thin films
- M.P. Petkov
- C.L. Wang
- et al.
- 2003
- Journal of Physical Chemistry B
Nanometer-scale pores in low-k dielectric films probed by positron annihilation lifetime spectroscopy
- C.L. Wang
- M.H. Weber
- et al.
- 2002
- Applied Physics Letters
Porosity characterization by beam-based three-photon positron annihilation spectroscopy
- Mihail P. Petkov
- Marc H. Weber
- et al.
- 2001
- Applied Physics Letters
Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
- Mihail P. Petkov
- Marc H. Weber
- et al.
- 2000
- Applied Physics Letters
Open volume defects (measured by positron annihilation spectroscopy) in thin film hydrogen-silsesquioxane spin-on-glass; correlation with dielectric constant
- Mihail P. Petkov
- Marc H. Weber
- et al.
- 1999
- Journal of Applied Physics