Fast calculation of images for high numerical aperture lithography
- Alan E. Rosenbluth
- Gregg Gallatin
- et al.
- 2004
- SPIE Advanced Lithography 2004
Publications
3 results for Ronald L. Gordon
Taming pattern and focus variation in VLSI design
- Fook-Luen Heng
- Puneet Gupta
- et al.
- 2004
- AMM 2004
Lithographic Image Simulation for the 21st Century with 19th-Century Tools
- Ronald L. Gordon
- Alan E. Rosenbluth
- 2003
- SPIE Optical Science and Technology 2003