Microstructural comparisons of ultrathin Cu films deposited by ion-beam and dc-magnetron sputtering
- W.L. Prater
- E.L. Allen
- et al.
- 2005
- Journal of Applied Physics
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Reduction of resistivity in Cu thin films by partial oxidation: Microstructural mechanisms
- Walter L. Prater
- Emily L. Allen
- et al.
- 2004
- Applied Physics Letters