Hafnium oxide gate dielectrics grown from an alkoxide precursor: Structure and defects
- Martin M. Frank
- Safak Sayan
- et al.
- 2004
- Materials Science and Engineering: B
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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7 results for Yves J. Chabal
Hydrogen Barrier Layer Against Silicon Oxidation during Atomic Layer Deposition of Al2 O3 and Hf O2
- Martin M. Frank
- Yu Wang
- et al.
- 2007
- JES
Hf O 2 and Al 2 O 3 gate dielectrics on GaAs grown by atomic layer deposition
- Martin M. Frank
- Glen D. Wilk
- et al.
- 2005
- Applied Physics Letters
Gas phase chlorination of hydrogen-passivated silicon surfaces
- Sandrine Rivillon
- Fabrice Amy
- et al.
- 2004
- Applied Physics Letters
Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon
- L.F. Edge
- D.G. Schlom
- et al.
- 2004
- Applied Physics Letters
Metallic contact formation for molecular electronics: Interactions between vapor-deposited metals and self-assembled monolayers of conjugated mono- and dithiols
- Bert De Boer
- Martin M. Frank
- et al.
- 2004
- Langmuir
An infrared study of H8Si8O12 cluster adsorption on Si(100) surfaces
- Joseph Eng Jr.
- Krishnan Raghavachari
- et al.
- 1998
- Journal of Chemical Physics