Mechanics of microelectronics structures as revealed by X-ray diffraction
- Conal E. Murray
- H. Yan
- et al.
- 2007
- Powder Diffraction
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3 results for Hanfei Yan
Mapping local strain in thin film/substrate systems using x-ray microdiffraction topography
- Hanfei Yan
- Conal E. Murray
- et al.
- 2007
- Applied Physics Letters
High-resolution strain mapping in heteroepitaxial thin-film features
- C.E. Murray
- H. Yan
- et al.
- 2005
- Journal of Applied Physics