Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
- A. Grill
- D. Edelstein
- et al.
- 2008
- Journal of Applied Physics
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155 results for Alfred Grill
Line resistance and electromigration variations induced by hydrogen-based plasma modifications to the silicon carbonitride/copper interface
- E. Todd Ryan
- Jeremy Martin
- et al.
- 2007
- JES
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- S. Gates
- D. Neumayer
- et al.
- 2007
- Journal of Applied Physics
The effect of plasma chemistry on the damage induced to porous SiCOH dielectrics
- A. Grill
- V.V. Patel
- 2006
- JES
Hydrogen plasma effects on ultralow-k porous SiCOH dielectrics
- A. Grill
- V. Sternhagen
- et al.
- 2005
- Journal of Applied Physics
Nanoindentation analysis of mechanical properties of low to ultralow dielectric constant SiCOH films
- Lugen Wang
- M. Ganor
- et al.
- 2005
- Journal of Materials Research
High-speed Germanium-on-SOI lateral PIN photodiodes
- G. Dehlinger
- S.J. Koester
- et al.
- 2004
- IEEE Photonics Technology Letters
How to restore superlow friction of DLC: The healing effect of hydrogen gas
- Julien Fontaine
- Michel Belin
- et al.
- 2004
- Tribology International
Superlow friction of diamond-like carbon films: A relation to viscoplastic properties
- Juliene Fontaine
- J.L. Loubet
- et al.
- 2004
- Tribology Letters
Frequency response of top-gated carbon nanotube field-effect transistors
- Dinkar V. Singh
- Keith A. Jenkins
- et al.
- 2004
- IEEE TNANO