An overview of 300mm SOI starting wafer quality and its yield detractors
- Pei Y. Tsai
- Marlene Almonte
- et al.
- 2005
- ISTFA 2005
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2 results for M.P. Guse
Interstitial oxygen reduction in silicon at thermal donor temperatures
- M.P. Guse
- R.L. Kleinhenz
- 1992
- Journal of Applied Physics