H atom reactions with GaAs 〈001〉
- Mei-Chen Chuang
- J.W. Coburn
- 1990
- Journal of Applied Physics
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3 results for Mei-Chen Chuang
Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
On the saturation effect in the picosecond near ultraviolet laser ablation of polyimide
- Mei-Chen Chuang
- Andrew C. Tam
- 1989
- Journal of Applied Physics