Publications

6 results for K.J. Stewart

Epoxy resins for deep UV lithography
- - K.J. Stewart
  - M. Hatzakis
  - et al.
- 2004
- Polymer Engineering & Science
New High-Resolution and High-Sensitivity Deep UV, X-Ray, and Electron-Beam Resists
- - M. Hatzakis
  - K.J. Stewart
  - et al.
- 1991
- JES
New high resolution and high sensitivity deep UV, x-ray, and electron beam resists
- - Michael Hatzakis
  - Kevin J. Stewart
  - et al.
- 1990
- Microelectronic Engineering
A simple bilayer lift-off process
- - David F. Witman
  - Jane M. Shaw
  - et al.
- 1990
- Microelectronic Engineering
Chemistry of hexamethylcyclotrisilazane (HMCTS) silylation
- - K.J. Stewart
  - J.M. Shaw
  - et al.
- 1989
- Symposium on Patterning Science and Technology 1989
Epoxy resins for deep UV lithography
- - K.J. Stewart
  - M. Hatzakis
  - et al.
- 1988
- SPE Regional Technical Conference 1988