Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
Publications
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3 results for S.F. Gong
TIN formed by ion beam nitriding of TiSi2
- S.E. Harnstrarn
- D. Moy
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Solid phase epitaxy and doping of Si through Sb-enhanced recrystallization of polycrystalline Si
- S.F. Gong
- H.T.G. Hentzell
- et al.
- 1988
- Applied Physics Letters