Caustic surfaces in a Keplerian two-lens beam shaper
- John A. Hoffnagle
- David L. Shealy
- 2007
- SPIE Photonic Devices + Applications 2007
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80 results for J. Hoffnagle
A solid-state 193 nm laser with high spatial coherence for sub-40 nm interferometric immersion lithography
- Andrew J. Merriam
- Donald S. Bethune
- et al.
- 2007
- SPIE Advanced Lithography 2007
Analytic design of laser beam shaping optics
- David L. Shealy
- John A. Hoffnagle
- 2007
- FiO 2007
Efficient nonlinear frequency conversion to 193-nm using cooled BBO
- Andrew J. Merriam
- James J. Jacob
- et al.
- 2007
- ASSP 2007
Optical system for variable resizing of round flat-top distributions
- George Nemeş
- John A. Hoffnagle
- 2006
- SPIE Optics + Photonics 2006
Analytic beam shaping for flattened output irradiance profile
- David L. Shealy
- John A. Hoffnagle
- et al.
- 2006
- SPIE Optics + Photonics 2006
A new derivation of the Dickey-Romero-Holswade phase function
- John A. Hoffnagle
- 2005
- SPIE Optics + Photonics 2005
Effects of dispersion on the performance of a refractive beam shaper
- John A. Hoffnagle
- David L. Shealy
- 2005
- SPIE Optics + Photonics 2005
Beam shaping profiles and propagation
- David L. Shealy
- John A. Hoffnagle
- 2005
- SPIE Optics + Photonics 2005
Studies of acid diffusion in low Ea chemically amplified photoresists
- G.M. Wallraff
- D. Medeiros
- et al.
- 2005
- Microlithography 2005