Dummy load technique for power efficiency estimation in rf discharges
- S.E. Savas
- D.E. Horne
- et al.
- 1986
- Review of Scientific Instruments
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2 results for R.W. Sadowski
Quartz crystal microbalance simulation of the directionality of Si etching in CF4 glow discharges
- Natasha C.Us
- R.W. Sadowski
- et al.
- 1986
- Plasma Chemistry and Plasma Processing