Dummy load technique for power efficiency estimation in rf discharges

Abstract

We have developed a simulated load technique for estimating power dissipation and effective impedance of the discharge which is useful over a wide range of driver frequencies. This is used to calculate the power delivered to the plasma and plasma current for frequencies from 0.12 to 13.56 MHz. This technique allows an efficiency calibration curve to be made for a given match circuit which can be quickly applied to any new discharge condition to give match efficiency.