Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution
- Stephen Matuszczak
- James F. Cameron
- et al.
- 1991
- Journal of Materials Chemistry
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Resist materials for microelectronics. Part 1
- C.Grant Wilson
- Murrae J. Bowden
- 1989
- CHEMTECH
Design, synthesis, and study of novel, thermally depolymerizable polycarbonates
- Jean M. J. Fréchet
- Francis M. Houlihan
- et al.
- 1985
- Journal of the Chemical Society, Chemical Communications