Very low temperature (<400°C) silicon molecular beam epitaxy: The role of low energy ion irradiation
- M. V. Ramana Murty
- Harry A. Atwater
- et al.
- 1993
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.