LOW DEFECT DENSITY INSULATING FILMS DEPOSITED ON ROOM TEMPERATURE SUBSTRATES.
- J.H. Magerlein
- John M. Baker
- et al.
- 1984
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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4 results for M.J. Palmer
Magnetic field enhanced reactive ion etching of polyimide
- J.T.C. Yeh
- K.R. Grebe
- et al.
- 1984
- JVSTA
Packaging Technology for Josephson Integrated Circuits
- Syamal K. Lahiri
- H. Randall Bickford
- et al.
- 1982
- IEEE Transactions on Components, Hybrids, and Manufacturing Technology
Pluggable Connectors for Josephson Computers
- Syamal K. Lahiri
- Pieter Geldermans
- et al.
- 1982
- IEEE Transactions on Components, Hybrids, and Manufacturing Technology