The calculation of wave aberration coefficients and wave aberration derivatives from ray trace data
- J.S. Wilczynski
- R.E. Tibbetts
- 1989
- Proceedings of SPIE 1989
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Design and fabrication of microelectronic lenses
- R.E. Tibbetts
- J.S. Wilczynski
- 1989
- Proceedings of SPIE 1989
A Reduction Camera for Exposure of Microcircuitry onto Wafers
- J.S. Wilc
- R.E. Tibbetts
- et al.
- 1968
- IEEE T-ED