A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- U. Gerlach-Meyer
- J.W. Coburn
- et al.
- 2008
- Journal of Applied Physics
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Ion-enhanced gas-surface chemistry: The influence of the mass of the incident ion
- U. Gerlach-Meyer
- J.W. Coburn
- et al.
- 1981
- Surface Science