Publication
Applied Physics Letters
Paper

Volatile metal-oxide incorporation in layers of GaAs, Ga 1-xAlxAs and related compounds grown by molecular beam epitaxy

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Abstract

A model is presented which relates the observed effects of substrate temperature and growth flux magnitudes upon layer quality to the presence of volatile oxides and the thermodynamics of the formation of nonvolatile oxides on the growth surface. A means for reducing oxide contamination is presented and the consequent benefits explored.

Date

01 Dec 1981

Publication

Applied Physics Letters

Authors

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