C.W. Wilmsen, Alan C. Warren, et al.
JES
No abstract available.
C.W. Wilmsen, Alan C. Warren, et al.
JES
Chu R. Wie, G. Burns, et al.
Nuclear Inst. and Methods in Physics Research, B
G.D. Pettit, J. Woodall, et al.
Applied Physics Letters
J. Freeouf, Alan C. Warren, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures