Vertical microfluidic probe heads

Abstract

Non-contact scanning microfluidic technologies such as the microfluidic probe (MFP) are of great interest for microscale (bio)chemical and biological applications on surfaces, which cannot be processed in closed microfluidic systems. Here we present a new type of MFP heads that have their main axis normal to the processed surface. Vertical MFP heads have in-plane-fabricated microchannels and are assembled by anodically bonding a microfabricated Si chip with a glass layer. These heads are easier to fabricate, package and position than standard MFP heads that are operated parallel to a surface.