Conference paper
Dual work function metal gate CMOS using CVD metal electrodes
V. Narayanan, A.C. Callegari, et al.
VLSI Technology 2004
Paper
Unpinned gallium oxide/GaAs interface by hydrogen and nitrogen surface plasma treatment
Abstract
The Fermi level at the Ga oxide/GaAs interface has been unpinned by rf plasma cleaning the GaAs surface in H2 and N2. Following plasma cleaning, a Ga oxide film is reactively electron beam deposited onto the substrate. Metal-oxide-semiconductor (MOS) capacitors fabricated on these structures show good high-frequency capacitance-voltage characteristics. This indicates that the density of interface states has been reduced to ∼10 11 eV-1 cm-2. The MOS capacitors are found to be stable in air after several months.