Uncooled and passive 0.5-1.5 THz FPA imager: Design and characterization of focal plane array imager based on antenna-coupled MOSFET bolometers

Abstract

Radiation in the 'THz gap' holds great promise for numerous novel applications from navigation aids to medical imaging. An all-silicon antenna coupled MOSFET bolometer, realized in CMOS-SOI-MEMS process is intended to become a cornerstone of a novel focal-plane-array imager aimed at operation in the 0.5-1.5 THz range. The present article reports on the progress in design and characterization of this innovative sensor. © 2013 IEEE.