M. Despont, J. Brugger, et al.
Sensors and Actuators, A: Physical
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
M. Despont, J. Brugger, et al.
Sensors and Actuators, A: Physical
M. Hinz, A. Kleiner, et al.
European Polymer Journal
A.W. Knoll, U. Dürig, et al.
Microelectronic Engineering
N. Blanc, J. Brugger, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures