U. Dürig
Applied Physics A: Materials Science and Processing
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
U. Dürig
Applied Physics A: Materials Science and Processing
A. Schirmeisen, G. Cross, et al.
New Journal of Physics
A. Stalder, U. Dürig
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
U. Dürig, H.R. Steinauer, et al.
Journal of Applied Physics