S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
The roughness of spin-cast polymer films arises from thermally activated capillary waves during preparation and typically amounts to about 0.5 nm rms measured on a micrometer-sized surface area. Templating from atomically flat mica substrates allows the creation of polymer films with a surface roughness approaching the molecular scale. Three regimes of spatial frequencies are identified in which the roughness is controlled by different physical mechanisms. We find that frozen-in elastic pressure waves ultimately limit the flatness of polymer films. © 2009 American Chemical Society.
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures